Flexible screen-printed SiC-based humidity sensors

Auteurs

Arjun Wadhwa, Department of Electrical Engineering, École de Technologie Supérieure, 1100 Notre Dame Street West, Montréal, H3C 1K3, QC, Canada
Alexandre Perrotton, Department of Electrical Engineering, École de Technologie Supérieure, 1100 Notre Dame Street West, Montréal, H3C 1K3, QC, Canada
Mohamad Hassan Taherian, Department of Mechanical Engineering, Université du Québec à Trois-Rivières, 3351 Bd des Forges, Trois-Rivières, G8Z 4M3, QC, Canada
Abbas Zirakjou, Department of Electrical Engineering, École de Technologie Supérieure, 1100 Notre Dame Street West, Montréal, H3C 1K3, QC, Canada
Jaime Benavides-Guerrero, Department of Electrical Engineering, École de Technologie Supérieure, 1100 Notre Dame Street West, Montréal, H3C 1K3, QC, Canada
Mathieu Gratuze, Department of Electrical Engineering, École de Technologie Supérieure, 1100 Notre Dame Street West, Montréal, H3C 1K3, QC, Canada
Fabrice Vaussenat, Department of Electrical Engineering, École de Technologie Supérieure, 1100 Notre Dame Street West, Montréal, H3C 1K3, QC, Canada
Martin Bolduc, Department of Mechanical Engineering, Université du Québec à Trois-Rivières, 3351 Bd des Forges, Trois-Rivières, G8Z 4M3, QC, Canada
Sylvain G. Cloutier, Department of Electrical Engineering, École de Technologie Supérieure, 1100 Notre Dame Street West, Montréal, H3C 1K3, QC, Canada

Type de document

Études primaires

Année de publication

2025

Langue

Anglais

Titre de la revue

Communications Engineering

Résumé

Humidity sensors are essential components in modern technology, spanning applications from residential appliances to the Internet of Things (IoT). However, conventional commercial sensors are typically rigid, constrained by narrow relative humidity (%RH) operating ranges, and require complex fabrication processes. In this study, we present a highly sensitive cubic silicon carbide (3C–SiC) nanoparticle-based relative humidity sensor, fabricated via serigraphic printing on to 5 mil thick flexible polyimide (Kapton^®) substrate. Devices are tested across a broad humidity range of 10–90%RH at ambient temperature and their performance is evaluated in a controlled humidity chamber. The sensor exhibits a robust response of 45.2% R/R₀, with a sensitivity of 5.34 Ω/%RH, an adsorption time of 18 seconds, and a desorption time of 46 seconds. Additionally, the device demonstrates low hysteresis of 6.5% at 60%RH, with excellent repeatability and stability over 3.5 hours of continuous cycling. To showcase their potential for real-world applications, the printed sensors are integrated into a commercial KN95 mask for monitoring respiration parameters, such as respiration rate. This integration highlights the potential for future exploration in human health monitoring, utilizing fully printed, low-cost sensing devices.

Mots-clés

Masque N95, N95 mask, Équipement de protection respiratoire, Respirator, Thermorégulation, Regulation of body temperature, Intelligence artificielle, Artificial intelligence, Équipement de protection individuelle, Personal protective equipment, Mesure de l'humidité, Humidity measurement

Numéro de projet IRSST

n/a

Citation recommandée

Wadhwa, A., Perrotton, A., Taherian, M. H., Zirakjou, A., Benavides-Guerrero, J., Gratuze, M., . . . Cloutier, S. G. (2025). Flexible screen-printed SiC-based humidity sensors. Communications Engineering, 4, article 96. https://doi.org/10.1038/s44172-025-00425-2